Electromagnetic Technology for Vacuum Metrology in the Typical Development of a Metrological-Grade Spinning Rotor Gauge

As the most precise viscous vacuum gauge, the spinning rotor gauge is widely used in the aerospace, nuclear, semiconductor, and other fields because of its excellent accuracy and chemical inertness. Herein, a metrological-grade spinning rotor vacuum gauge is developed, and its performance is evaluated. It can be used for international comparison of vacuum standards and construction of national vacuum measurement traceability and transmission systems. This paper presents the design of a single-degree-of-freedom permanent magnet-biased rotor suspension system, a high-speed rotary stepper drive system, a rotational angular velocity determination system, a lateral damping system, and a transducer in detail. The change in residual drag is less than 0.49% after 50 minutes of start-up. There is good consistency and linearity in the range of 9.1727×10⁻⁵ Pa to 1.2081 Pa.